JPH0418762B2 - - Google Patents
Info
- Publication number
- JPH0418762B2 JPH0418762B2 JP18248485A JP18248485A JPH0418762B2 JP H0418762 B2 JPH0418762 B2 JP H0418762B2 JP 18248485 A JP18248485 A JP 18248485A JP 18248485 A JP18248485 A JP 18248485A JP H0418762 B2 JPH0418762 B2 JP H0418762B2
- Authority
- JP
- Japan
- Prior art keywords
- scanning beam
- scanning
- measured
- reflecting mirrors
- photoelectric converter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 15
- 238000005259 measurement Methods 0.000 claims description 14
- 238000012937 correction Methods 0.000 claims description 8
- 238000003708 edge detection Methods 0.000 description 9
- 230000001360 synchronised effect Effects 0.000 description 7
- 239000013256 coordination polymer Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000000630 rising effect Effects 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Mechanical Optical Scanning Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18248485A JPS6243502A (ja) | 1985-08-20 | 1985-08-20 | 光学式測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18248485A JPS6243502A (ja) | 1985-08-20 | 1985-08-20 | 光学式測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6243502A JPS6243502A (ja) | 1987-02-25 |
| JPH0418762B2 true JPH0418762B2 (en]) | 1992-03-27 |
Family
ID=16119081
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18248485A Granted JPS6243502A (ja) | 1985-08-20 | 1985-08-20 | 光学式測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6243502A (en]) |
-
1985
- 1985-08-20 JP JP18248485A patent/JPS6243502A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6243502A (ja) | 1987-02-25 |
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